Ithagethi ye-Tantalum sputtering isetyenziswa ikakhulu kwishishini le-semiconductor kunye neshishini lokugquma lokukhanya.Senza imiba eyahlukeneyo yeethagethi ze-tantalum sputtering ngesicelo sabathengi abavela kwishishini le-semiconductor kunye neshishini lokukhanya ngokusebenzisa indlela yokunyibilikisa yesithando somlilo se-EB.Ngokulumkela inkqubo eyodwa yokuqengqeleka, ngonyango oluntsonkothileyo kunye nobushushu obuchanekileyo be-annealing kunye nexesha, sivelisa imilinganiselo eyahlukeneyo yeethagethi ze-tantalum sputtering ezifana neethagethi zediski, iithagethi ezixande kunye neethagethi ezijikelezayo.Ngaphezu koko, siqinisekisa ukucoceka kwe-tantalum phakathi kwe-99.95% ukuya kwi-99.99% okanye ngaphezulu;ubukhulu beenkozo bungaphantsi kwe-100um, ukucaba kungaphantsi kwe-0.2mm kunye noMphezulu